Development of Mems-based Ecf Micro Rate Gyro

We are proposing a liquid rate gyro named “ECF micro rate gyro”. Although the sensing principle is based on that of a conventional gas rate sensor, the liquid micro rate gyro works by an electro-conjugate fluid (ECF) instead of a gas. The electro-conjugate fluid is a dielectric fluid that works as a functional fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. In our concept model, an ECF micro rate gyro was made by machines and handwork. In this study, we propose a MEMS fabrication process of ECF jet generator, flow channel and sensing hot wire, which are parts of the ECF micro rate gyro. By using MEMS technology, we can downsize and integrate an ECF micro rate gyro. Then we perform functional test of the fabricated prototype and confirmed a function as a rate gyro.